Author:
James S.D.,Johnson R.G.,Higashi R.E.
Cited by
3 articles.
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1. Gas Sensors;Reference Module in Materials Science and Materials Engineering;2017
2. Vacuum gauging with complementary metal–oxide–semiconductor microsensors;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1995-05
3. Novel fully CMOS-compatible vacuum sensor;Sensors and Actuators A: Physical;1995-01