Author:
San Andres Enrique,Pantisano Luigi,Ramos Javier,Roussel Philippe J.,O'Sullivan Barry J.,Toledano-Luque Mara,DeGendt Stefan,Groeseneken Guido
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Cited by
9 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. High-kgadolinium scandate on Si obtained by high pressure sputtering from metal targets andin-situplasma oxidation;Semiconductor Science and Technology;2017-02-10
2. Gd2O3 on InP Substrates;Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets;2017
3. Plasma Oxidation of Gd2O3 and Sc2O3;Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets;2017
4. Thermal Oxidation of Gd2O3;Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets;2017
5. Characterization Techniques;Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets;2017