Impact of Super-long-throw PVD on TSV Metallization and Die-to-Wafer 3D Integration Based on Via-last-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Impact of Super-long-throw PVD on TSV Metallization and Die-to-Wafer 3D Integration Based on Via-last

Published:2023-05-10 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE International 3D Systems Integration Conference (3DIC)
language:
Short-container-title:

Author:

Shen Jiayi¹,Liu Chang²,Hoshi Tadaaki²,Sinoda Atsushi²,Kino Hisashi³,Tanaka Tetsu³,Mariappan Murugesan⁴,Koyanagi Mitsumasa⁵,Fukushima Takafumi⁶

Affiliation:

1. Graduate School of Engineering, Tohoku University,Dept. Mechanical System Engineering,Sendai,Japan

2. Graduate School of Engineering Tohoku University,Sendai,Japan

3. Graduate School of Biomedical Engineering, Tohoku University,Sendai,Japan

4. Tohoku University,Global INTegration Initiative (GINTI) New Industry Creation Hatchery Center (NICHe),Sendai,Japan

5. Tohoku University,GINTI, NICHe,Sendai,Japan

6. Graduate School of Engineering, Tohoku University,GINTI, NICHe,Sendai,Japan

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10154896/10154899/10154930.pdf?arnumber=10154930

Reference9 articles.

1. Three-dimensional integration technology based on reconfigured wafer-to-wafer and multichip-to-wafer stacking using self-assembly method

2. New heterogeneous multichip module integration technology using self-assembly method;fukushima;IEDM Tech Dig,2008

3. Multichip-to-wafer 3D integration technology using chip self-assembly with excimer lamp irradiation;fukushima;IEEE Trans Electron Devices,2012

4. Novel low pressure sputtering source and improved vacuum deposition of small patterned features using Precision Shadow masks;decker;Society of Vacuum Coaters Technical Conference,0

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP