Contrasting single-wafer and batch processing for memory devices
-
Published:2003-05
Issue:2
Volume:16
Page:138-146
-
ISSN:0894-6507
-
Container-title:IEEE Transactions on Semiconductor Manufacturing
-
language:en
-
Short-container-title:IEEE Trans. Semicond. Manufact.
Author:
Weimer R.A.,Eppich D.M.,Beaman K.L.,Powell D.C.,Gonzalez F.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Rapid Thermal Processing;Handbook of Semiconductor Manufacturing Technology, Second Edition;2007-07-09