Genetic Algorithm Application to Enlarge Travel Range for Multi-Electrode MEMS Resonators
Author:
Affiliation:
1. Binghamton University,Department of Mechanical Engineering,Binghamton,USA
Funder
National Science Foundation (NSF)
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9966996/9966997/09967334.pdf?arnumber=9967334
Reference18 articles.
1. A resonant pressure MEMS sensor based on levitation force excitation detection
2. Design, Modeling, and Demonstration of a MEMS Repulsive-Force Out-of-Plane Electrostatic Micro Actuator
3. Large-Stroke Capacitive MEMS Accelerometer Without Pull-In
4. Modeling and Characterization of a Pull-in Free MEMS Microphone
5. Dynamic behavior of an electrostatic MEMS resonator with repulsive actuation
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