A feasibility study on relative humidity sensing using Silicon-on-Nothing pMUTs
Author:
Affiliation:
1. Institute of Microelectronics, A*STAR,Singapore
Funder
A*STAR
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9966996/9966997/09967062.pdf?arnumber=9967062
Reference28 articles.
1. A Time-of-Flight (ToF) estimation algorithm for ranging using Silicon-On-Nothing pMUTs
2. Ultrasonic Monitoring of Internal Temperature Distribution in a Heated Material
3. Temperature Distribution in a Rectangular Space Measured by a Small Number of Transducers and Reconstructed from Reflected Sounds
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1. High-Accuracy Dry-Bulb Temperature Sensing with Short-Time Fourier Transform (STFT) Using PSON pMUTs;2023 IEEE SENSORS;2023-10-29
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