Affiliation:
1. Aerospace Information Research Institute, Chinese Academy of Sciences,State Key Laboratory of Transducer Technology,Beijing,China,100190
Funder
National Key R&D Program of China
National Science Fund for Distinguished Young Scholars
National Natural Science Foundation of China
Youth Innovation Promotion Association CAS
Reference13 articles.
1. Strain sensitive resonant gate transistor
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4. A Novel Piezoresistive Sensitive Structure for Micromachined High-pressure Sensors;yu;IEEE NEMS 2017,2017
5. Advances in Silicon Resonant Pressure Transducers