Performance of a Monolithic E-Nose Array Integrating MEMS and ALD Processing
Author:
Affiliation:
1. North Carolina State University,Department of Electrical and Computer Engineering,Raleigh,NC,USA
2. State University of New York Polytechnic Institute,Utica,NY,USA
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10324456/10324848/10325054.pdf?arnumber=10325054
Reference36 articles.
1. A novel monolithic array of multiple metal oxide sensors for E-Nose applications via selective on-chip annealing of nanolayered ALD stacks
2. Highly sensitive amperometric Nafion-based CO sensor using Pt/C electrodes with different kinds of carbon materials
3. Highly Sensitive ALD SnO2 Sensors and the Role of its Thickness in Gas Sensing Capabilities
4. Ultra-thin filmed SnO2 gas sensor with a low-power micromachined hotplate for selective dual gas detection of carbon monoxide and methane
5. Review—System-on-Chip SMO Gas Sensor Integration in Advanced CMOS Technology
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