Wide Dynamic Range of a MEMS Differential Resonant Accelerometer with Asymmetric T-Shaped Electrodes-Reference-Cited by-同舟云学术

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Wide Dynamic Range of a MEMS Differential Resonant Accelerometer with Asymmetric T-Shaped Electrodes

Published:2023-10-29 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE SENSORS
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Author:

Masunishi Kei¹,Ogawa Etsuji¹,Ono Daiki¹,Miyazaki Fumito¹,Uchida Kengo¹,Ogawa Jumpei¹,Murase Hideaki¹,Ishibashi Fumitaka¹,Tomizawa Yasushi¹

Affiliation:

1. Toshiba Corporation, Corporate Research & Development Center,Kawasaki,Japan

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10324456/10324848/10324992.pdf?arnumber=10324992

Reference7 articles.

1. Demonstration of gyroless north finding using a T-shaped MEMS differential resonant accelerometer;masunishi;Proc MEMS 2023,0

2. An acceleration sensing method based on mode localizatio of weakly coupled resonators;zhang;Journal of Microelectromechanicals Systems,2016

3. A T-shaped MEMS differential resonant accelerometer with module-based demonstration of>134 dB dynamic range and <1mdeg absolute tilt angle precision;masunishi;Proc MEMS 2022,0

4. A mode localization based resonant MEMS tilt sensor with alinear measurement range 360°;li;Proc MEMS 2016,0

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Demonstration of Multi-axis Sensitivity and Temperature Compensation for a Physically Tightly-Coupled MEMS IMU Integrating a Mode-Matched Gyroscope and Two Differential Resonant Accelerometers;2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL);2024-03-25

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