A Wide Temperature Range Weakly Coupled Resonant Micro-pressure Sensor
Author:
Affiliation:
1. Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing,China
Funder
National Key R&D Program of China
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10324456/10324848/10325141.pdf?arnumber=10325141
Reference14 articles.
1. Temperature Dependence of Quality Factor in MEMS Resonators
2. An Electrostatic Comb Excitation Resonant Pressure Sensor for High Pressure Applications
3. A Resonant Low-Pressure Microsensor With Low Temperature Disturbance
4. A Comparative Study of Output Metrics for an MEMS Resonant Sensor Consisting of Three Weakly Coupled Resonators
5. Towards ultra-high resolution mode-localised MEMS sensors;pandit;University of Cambridge,2019
Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A Digital Closed-Loop Control System for MEMS Resonant Pressure Sensors Based on a Quadrature Phase-Locked Loop;IEEE Sensors Journal;2024-04-01
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