High-Resolution Optical Three-Axis Tactile Microsensor Based on III-Nitride Devices With Integrated PDMS Bumps-Reference-Cited by-同舟云学术

High-Resolution Optical Three-Axis Tactile Microsensor Based on III-Nitride Devices With Integrated PDMS Bumps

Published:2023-12 Issue:12 Volume:44 Page:2035-2038
ISSN:0741-3106
Container-title:IEEE Electron Device Letters
language:
Short-container-title:IEEE Electron Device Lett.

Author:

Yin Jiahao¹^ORCID,Luo Yumeng¹,Chen Liang²^ORCID,Wang Qing³^ORCID,Yu Hongyu³,Li Kwai Hei³^ORCID

Affiliation:

1. School of Microelectronics, Southern University of Science and Technology, Shenzhen, China

2. Foshan Electrical and Lighting Company Ltd., Foshan, China

3. Engineering Research Center of Three Dimensional Integration in Guangdong Province and the School of Microelectronics, Southern University of Science and Technology, Shenzhen, China

Funder

National Natural Science Foundation of China

Shenzhen Fundamental Research Program

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/55/10330769/10287376.pdf?arnumber=10287376

Reference23 articles.

1. Soft-bubble: A highly compliant dense geometry tactile sensor for robot manipulation

2. Fiber Bragg Grating-Based Triaxial Force Sensor With Parallel Flexure Hinges

3. Tactile Sensing With Scalable Capacitive Sensor Arrays on Flexible Substrates

4. GelSight: High-resolution robot tactile sensors for estimating geometry and force;yuan;SENSORS,2017

5. GelSlim: A High-Resolution, Compact, Robust, and Calibrated Tactile-sensing Finger

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