Xenon Z-Pinch Discharge Plasma EUV Source Driven by Ultrashort Current Pulse
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Published:2016-07
Issue:7
Volume:44
Page:1228-1234
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ISSN:0093-3813
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Container-title:IEEE Transactions on Plasma Science
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language:
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Short-container-title:IEEE Trans. Plasma Sci.
Author:
Lu Peng,Katsuki Sunao,Akiyama Hidenori
Funder
Tianjin Research Program of Applied basic and Cutting-Edge Technology
Scientific Startup Foundation through the Civil Aviation University of China
Fundamental Research Funds for The Central Universities
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Condensed Matter Physics,Nuclear and High Energy Physics