Automation of Thin Film Flaw Detection Processes as a Stage in the Development of Laser Resistor Trimming Technology in Microelectronics-Reference-Cited by-同舟云学术

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Automation of Thin Film Flaw Detection Processes as a Stage in the Development of Laser Resistor Trimming Technology in Microelectronics

Published:2023-06-29 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE 24th International Conference of Young Professionals in Electron Devices and Materials (EDM)
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Author:

Kondrashov Vladimir V.¹,Zemlyakov Evgeny V.²,Seredin Oleg S.³,Chapkin Vyacheslav V.¹,Pozdeeva Ekaterina Yu.²,Stankevich Stanislav L.²

Affiliation:

1. Public Joint-Stock Company “Scientific and Production Association “Strela”,Tula,Russia

2. State Marine Technical University,World-Class Research Center, “Advanced Digital Technologies”,Saint Petersburg,Russia

3. Tula State University,Cognitive Technologies and Simulation Systems Lab,Tula,Russia

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10224902/10225012/10225124.pdf?arnumber=10225124

Reference18 articles.

1. Effects of high voltage pulse trimming on structural properties of thick-film resistors

2. Research progress of laser trimming: A mini review;su;Proceedings of the SPIE 10813 Advanced Laser Processing and Manufacturing II,2018

3. Downward trimming of polymer thick film resistors through high voltage pulses;srinivasa;International Journal of Microcircuits and Electronic Packaging,2001

4. Resistor trimming geometry; past, present and future;alafogianni;LOP Conf Ser Mater Sci Eng,2002

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