1. Research on MEMS scanning mirror driven by electrostatic comb [D];wang;University of Chinese Academy of Sciences (CAS Institute of Optoelectronic Technology,0
2. MEMS Materials and Processes Manual [M];reza;Nanjing Press of Southeast University,2014
3. Reliability design and process of ceramic capacitive force sensor [J];tang;Sensors and Microsystems,2019
4. Design and preparation of silicon based films for miniature capacitive pressure sensors[J];tao;Journal of Xiamen University,0
5. Engineering robust design based on stochastic optimization [J];chen;Journal of University of Science and Technology Beijing,1999