A microcomputer-based novel deposition controller for preparing films with graded composition
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Published:2000
Issue:3
Volume:36
Page:928-934
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ISSN:0093-9994
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Container-title:IEEE Transactions on Industry Applications
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language:
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Short-container-title:IEEE Trans. on Ind. Applicat.
Author:
Shivalingappa L.,Narasimha Rao K.,Mohan S.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Control and Systems Engineering