An electrostatic lower stator axial-gap polysilicon wobble motor. I. Design and modeling-Reference-Cited by-同舟云学术

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An electrostatic lower stator axial-gap polysilicon wobble motor. I. Design and modeling

Published:1998-03 Issue:1 Volume:7 Page:79-86
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Legtenberg R.,Berenschot E.,van Baar J.,Elwenspoek M.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx4/84/14428/00661387.pdf?arnumber=661387

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