Surface Micromachined MEMS Accelerometers on Flexible Polyimide Substrate-Reference-Cited by-同舟云学术

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Surface Micromachined MEMS Accelerometers on Flexible Polyimide Substrate

Published:2011-10 Issue:10 Volume:11 Page:2318-2326
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Gonenli I. E.,Celik-Butler Z.,Butler D. P.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx5/7361/5975325/05742667.pdf?arnumber=5742667

Cited by 23 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Accessorizing Quadrupedal Robots with Wearable Electronics;Advanced Intelligent Systems;2024-01-31

2. Design of MEMS capacitive comb accelerometer with perforated proof mass for seismic applications;Journal of King Saud University - Science;2023-04

3. Aero Acoustic MEMS Microphone Integration in Ultra-Thin and Flexible Substrate;2022 IEEE 24th Electronics Packaging Technology Conference (EPTC);2022-12-07

4. Dynamic Responses and High-Energy Vibration Analysis of Flexible Resonant Curved Microbeam on a Soft Substrate;Journal of Vibration Engineering & Technologies;2022-08-02

5. Self-Packaged, Flexible, Bendable MEMS Sensors and Energy Harvesters;IEEE Sensors Journal;2021-06-01

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