New Stability Method of a Multirate Controller for a Three-Axis High- $Q$ MEMS Accelerometer With Simultaneous Electrostatic Damping
Author:
Funder
CIFRE Program
NXP Semiconductors
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7361/8410048/08374059.pdf?arnumber=8374059
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Identification and Closed-Loop Control of High-Performance Accelerometers;2023 IEEE Sensors Applications Symposium (SAS);2023-07-18
2. A Low-Noise Micromachined Accelerometer with Reconfigurable Electrodes for Resonance Suppression;Micromachines;2023-06-02
3. Enhancing the Shock Response Performance of Micromachined Silicon Resonant Accelerometers by Electrostatic Active Damping Control;Micromachines;2021-12-12
4. Opto-Mechanical Photonic Crystal Cavities for Sensing Application;Applied Sciences;2020-10-12
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