1. Multi-wavelength approach towards on-product overlay accuracy and robustness;bhattacharyya;Proc SPIE,0
2. Target design optimization for overlay scatterometry to improve on-product overlay;smilde;Proc SPIE,0
3. Optical metrology using support vector machine with profile parameter inputs;jin,2009
4. Identification and reconstruction of diffraction structures in optical scatterometry using support vector machine method
5. Matching between simulations and measurements as a key driver for reliable overlay target design;lozenko;Proc SPIE,0