Advanced getter solutions at wafer level to assure high reliability to the last generations MEMS-Reference-Cited by-同舟云学术

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Advanced getter solutions at wafer level to assure high reliability to the last generations MEMS

Published: Issue: Volume: Page:
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Container-title:2003 IEEE International Reliability Physics Symposium Proceedings, 2003. 41st Annual.
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Author:

Moraja M.,Amiotti M.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/8520/26927/01197791.pdf?arnumber=1197791

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. MEMS tandem ion-sorption micropump;Journal of Micromechanics and Microengineering;2017-11-16

2. MEMS Vacuum Pumps;Journal of Microelectromechanical Systems;2017-08

3. MEMS-Type Self-Packaged Field-Emission Electron Source;IEEE Transactions on Electron Devices;2015-07

4. RF MEMS Devices for Communication Systems;Silicon-Based Millimeter-wave Technology - Measurement, Modeling and Applications;2012

5. RF MEMS Satellite Switch Matrices;IEEE Microwave Magazine;2011-08

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