Author:
Maj Cezary,Szermer Michal,Jankowski Mariusz
Cited by
2 articles.
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1. Design and Simulation of Parallel Plate-Comb Type Mems Capacitive Accelerometer Using COMSOL;Lecture Notes in Electrical Engineering;2022-09-12
2. Capacitance Deviations for Deformed Parts of Solid MEMS Sensors;2020 IEEE XVIth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH);2020-04