Effects of Coil Surface Current Density on Plasma Characteristics in a PECVD Chamber
Author:
Affiliation:
1. School of Physics and Electronic Engineering, Jiangsu Normal University,Xuzhou,China,221116
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9856647/9856709/09856773.pdf?arnumber=9856773
Reference7 articles.
1. Diagnosis of the Argon Plasma in a PECVD Coating Machine
2. Study on effect of process and structure parameters on SiN x H y growth by in-line PECVD;cao;J Solar Energy,0
3. An experimental study of the plasma parameters of a hybrid low-pressure RF discharge
4. Study of the Characteristics of DC and ICP Hybrid Discharge Plasmas
5. Sheath formation in collisional, low pressure, and magnetized plasma
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