Author:
Kawasaki Y.,Tokunaga K.,Horita K.,Mitsuda K.,Yamaguchi A.,Ueno A.,Teratani A.,Katayama T.,Hayami K.,Togawa A.,Ohno Y.,Yoneda M.
Cited by
1 articles.
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1. Approaches to single wafer high current ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2005-08