Q Control of an AFM Microcantilever With Double-Stack AlN Sensors and Actuators
Author:
Affiliation:
1. Erik Johnsson School of Engineering and Computer Science, The University of Texas at Dallas, Richardson, TX, USA
Funder
U.S. Department of Energy’s Office of Energy Efficiency and Renewable Energy (EERE) through the Advanced Manufacturing Office
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
https://ieeexplore.ieee.org/ielam/7361/9722574/9674887-aam.pdf
Reference39 articles.
1. $Q$ Control of an Active AFM Cantilever With Differential Sensing Configuration
2. High-bandwidth multimode self-sensing in bimodal atomic force microscopy
3. High-Quality Mapping of DNA-Protein Complexes by Dynamic Scanning Force Microscopy
4. Theory of Q control in atomic force microscopy
5. Characterization and optimization of scan speed for tapping-mode atomic force microscopy
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