A Background Test and Calibration Technique of Nonlinear Mismatches in MEMS Oscillating Accelerometers-Reference-Cited by-同舟云学术

A Background Test and Calibration Technique of Nonlinear Mismatches in MEMS Oscillating Accelerometers

Published:2023-04-01 Issue:7 Volume:23 Page:6596-6606
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Cai Siqi¹^ORCID,Zhang Wenhui¹^ORCID,Sun Tao²,Yu Chencheng²,Jiang Jinling³,Cai Bin⁴,Qian Jiuchao¹^ORCID,Zhang Jing³^ORCID,Su Yan³,Zhao Jian¹^ORCID

Affiliation:

1. Department of Micro/Nano Electronics, Shanghai Jiao Tong University, Shanghai, China

2. Shanghai Institute of Spacecraft Equipment, Shanghai, China

3. School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China

4. Shanghai Aerospace Control Technology Institute, Shanghai, China

Funder

National Natural Science Foundation of China

Application Innovation Project from the Equipment Development Department of China

Fundamental Research Funds for the Central Universities

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/7361/10089784/10045667.pdf?arnumber=10045667

Reference27 articles.

1. A MEMS Resonant Accelerometer With High Performance of Temperature Based on Electrostatic Spring Softening and Continuous Ring-Down Technique

2. Microleverage DETF Aluminum Nitride resonating accelerometer

3. High Quality Factor Resonant MEMS Accelerometer With Continuous Thermal Compensation

4. Frequency-Modulated MEMS Gyroscopes: A Review

5. The silicon oscillating accelerometer: A high-performance MEMS accelerometer for precision navigation and strategic guidance applications;hopkins;Proc Nat Tech Meeting Inst Navigat,2006

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