Development of a High-Precision Optical Force Sensor With μN-Level Resolution-Reference-Cited by-同舟云学术

Development of a High-Precision Optical Force Sensor With μN-Level Resolution

Published:2022-07-01 Issue:13 Volume:22 Page:12738-12745
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Cheng Zhenying¹^ORCID,Liu Xin¹,Lei Yingjun¹^ORCID,Pan Qiaosheng¹^ORCID,Li Ruijun¹^ORCID

Affiliation:

1. Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei, China

Funder

National Natural Science Foundation of China

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/7361/9812846/09777996.pdf?arnumber=9777996

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