MEMS Gas Flow Sensor Based on Thermally Induced Cantilever Resonance Frequency Shift
Author:
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7361/9040352/08950330.pdf?arnumber=8950330
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Research on Natural Gas Flow Detection Based on Heat Distribution Type MEMS Gas Flow Sensor;2024 6th International Conference on Energy Systems and Electrical Power (ICESEP);2024-06-21
2. Effect of the Substrate Heat Conduction on the Heat Distribution Type MEMS Natural Gas Flow Sensor;2024 5th International Conference on Information Science, Parallel and Distributed Systems (ISPDS);2024-05-31
3. Simulation Research on the Natural Gas Flow Sensor Based the MEMS Technology;2024 6th International Conference on Communications, Information System and Computer Engineering (CISCE);2024-05-10
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5. Electric-Force Conversion Performance of Si-Based LiNbO3 Devices Based on Four Cantilever Beams;Micromachines;2023-10-27
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