Theorectical Optimazation of Surface Acoustic Waves Resonator based on 37°Y-47°X LINBO3/SIO2/SIC Multilayered Structure-Reference-Cited by-同舟云学术

Theorectical Optimazation of Surface Acoustic Waves Resonator based on 37°Y-47°X LINBO3/SIO2/SIC Multilayered Structure

Published:2022-10-11 Issue: Volume: Page:
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Container-title:2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)
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Author:

Liu Jinwei¹,Ma Jun¹,Qian Lirong¹,Wang Yuanyuan¹,Li Cuiping¹,Yang Baohe¹,Tian Yahui²,Li Honglang³

Affiliation:

1. Tianjin University of Technology,Tianjin Key Laboratory of Film Electronic and Communication Devices, School of Integrated Circuit science and Engineering,Tianjin,P. R. China,300384

2. Chinese Academy of Sciences,Institute of Acoustics,Beijing,P. R. China,100190

3. National Center for Nanoscience and Technlogy,Beijing,P. R. China,100190

Funder

Research and Development

Nova

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10045834/10045835/10046026.pdf?arnumber=10046026

Reference13 articles.

1. Temperature Dependence of the Elastic, Piezoelectric, and Dielectric Constants of Lithium Tantalate and Lithium Niobate

2. Accurate measurements of the acoustical physical constants of LiNbO/sub 3/ and LiTaO/sub 3/ single crystals

3. Theorectical Investigation Of Longitudinal Surface Acoustic Waves In Rotated Y-Cut LiNbO3/Sic Heterostructures [C];jun;2020 15th Symposium on Piezoelectrcity Acoustic Waves and Device Applications (SPAWDA),2021

4. Leaky surface acoustic waves in Z-LiNbO3 substrates with epitaxial AIN overlays

5. Fundamental mode 5 GHz surface-acoustic-wave filters using optical lithography

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1. Monolithic 1–6-GHz Multiband Acoustic Filters Using SH-SAW and LLSAW on LiNbO$_{3}$/SiO$_{2}$/SiC Platform;IEEE Transactions on Microwave Theory and Techniques;2024