ADS Simulation Design of Narrowband FBAR Filter-Reference-Cited by-同舟云学术

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ADS Simulation Design of Narrowband FBAR Filter

Published:2022-10-11 Issue: Volume: Page:
ISSN:
Container-title:2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)
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Author:

Mu Danyu¹,Wang Lu¹,Zhao Libo¹,Fang Xudong¹

Affiliation:

1. the International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, School of Mechanical Engineering, Xi’an Jiaotong University,State Key Laboratory for Manufacturing Systems Engineering,Xi’an,China,710049

Funder

National Postdoctoral Program for Innovative Talents

National Natural Science Foundation of China

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10045834/10045835/10045836.pdf?arnumber=10045836

Reference9 articles.

1. Modeling of thin film resonators and filters

2. Research on some Problems of Thin film Bulk acoustic resonator (FBAR) technology;jin;Journal of Zhejiang University,2006

3. A 2 GHz reference oscillator incorporating a temperature compen-sated BAW resonator;vanhelmont;Proceedings of IEEE Ultrasonics Symposium Vancouver,2006

4. Study on performance and On-chip Structure of MEMS Acoustic Resonator;zhang;University of Electronic Science and Technology of China,2016

5. Design of s-band FBAR filter chip;li;PIEZOELECTRICS & ACOUSTOOPTICS,2013

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