Study on Pt-Rh Composite Thin Film Electrode for High Temperature Saw Device-Reference-Cited by-同舟云学术

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Study on Pt-Rh Composite Thin Film Electrode for High Temperature Saw Device

Published:2022-10-11 Issue: Volume: Page:
ISSN:
Container-title:2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)
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Author:

Zhu Daiqing¹,Xuan Weipeng¹,Chen Jinkai¹,Dong Shurong²,Jin Hao²,Luo Jikui²

Affiliation:

1. College of Electronics & Information Hangzhou Dianzi University,Ministry of Education Key Lab. of RF Circuits and Systems,Hangzhou,China

2. Zhejiang University,Key Lab. of Adv. Micro/Nano Electron. Dev. & Smart Sys. of Zhejiang, College of Info. Sci. & Electron. Eng.,Hangzhou,China

Funder

National Natural Science Foundation of China

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10045834/10045835/10046036.pdf?arnumber=10046036

Reference5 articles.

1. Thin Film Electrodes for High Temperature Surface Acoustic Wave Devices

2. New composite electrode for high temperature surface acoustic wave device

3. Influence of composition and multilayer architecture on electrical conductivity of high temperature Pt-alloy films

4. Novel Multilayer SAW Temperature Sensor for Ultra-High Temperature Environments

5. Thin films and techniques for SAW sensor operation above 1000°C

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