A Design Approach for High-Q FBARs with Double Frames-Reference-Cited by-同舟云学术

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A Design Approach for High-Q FBARs with Double Frames

Published:2022-10-11 Issue: Volume: Page:
ISSN:
Container-title:2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)
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Author:

Zhang Biao¹,Xuan Weipeng¹,Shi Linhao¹,He Xingli²,Dong Shurong³,Jin Hao³,Luo Jikui³

Affiliation:

1. Hangzhou Dianzi University,Ministry of Education Key Lab. of RF Circuits and Systems, College of Electronics & Information,Hangzhou,China,310018

2. Soochow University,School of Electronic and Information Engineering,Suzhou,China,215006

3. Zhejiang University,Key Lab. of Adv. Micro/Nano Electron. Dev. & Smart Sys. of Zhejiang, College of Info. Sci. & Electron. Eng.,Hangzhou,China

Funder

National Natural Science Foundation of China

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10045834/10045835/10045863.pdf?arnumber=10045863

Reference5 articles.

1. Invariant Definitions of the Unloaded Q Factor (Short Paper)

2. Bulk acoustic wave devices – why, how, and where they are going;mahon;CS MANTECH Conference,2007

3. Acoustic bulk wave composite resonators

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Single-Crystalline Bulk Acoustic Wave Resonators Fabricated With AlN Film Grown by a Combination of PLD and MOCVD Methods;IEEE Electron Device Letters;2024-04

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