Phononic Film Bulk Acoustic Resonator for High mass-sensitive Biosensing-Reference-Cited by-同舟云学术

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Phononic Film Bulk Acoustic Resonator for High mass-sensitive Biosensing

Published:2022-12-04 Issue: Volume: Page:
ISSN:
Container-title:2022 International Conference on Microelectronics (ICM)
language:
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Author:

Al-Qahtani Aisha M.¹,Ali Shawkat²,Khan Arshad²,Khelif Abdelkrim³,Bermak Amine²

Affiliation:

1. Hamad Bin Khalifa University,College of Health and Life Science,Education City,Qatar

2. Hamad Bin Khalifa University,College of Science and Engineering,Education City,Qatar

3. Université de Bourgogne Franche-Comté,Institut FEMTO-ST CNRS,Besançon,France,25000

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10005313/10005321/10005339.pdf?arnumber=10005339

Reference11 articles.

1. An Overview of High Frequency Acoustic Sensors—QCMs, SAWs and FBARs—Chemical and Biochemical Applications

2. Shear Horizontal Phononic Metasurface for In-Liquid Gravimetric Biosensing

3. Film bulk acoustic resonators (FBARs) as biosensors: A review

4. Towards Acoustic Radiation Free Lamb Wave Resonators for High-Resolution Gravimetric Biosensing

5. Acoustic MEMS transducers for biomedical applications

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