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Pattern Optimization for Phyllotactic Fixed Abrasive Pads Based on the Trajectory Method

  • Published:2017-02 Issue:1 Volume:30 Page:78-85
  • ISSN:0894-6507
  • Container-title:IEEE Transactions on Semiconductor Manufacturing
  • language:
  • Short-container-title:IEEE Trans. Semicond. Manufact.

Author:

Fang Congfu,Zhao ZaixingORCID,Hu Zhongwei

Funder

National Natural Science Foundation of China

Project of Natural Science Foundation of Fujian Province

Promotion Program for Young and Middle-Aged Teacher in Science and Technology Research of Huaqiao University

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of kinematic parameters considering workpiece rotation on surface quality in YAG double-sided planetary lapping with the trajectory method;The International Journal of Advanced Manufacturing Technology;2022-11-03

2. Influence of the dynamic disc grinding wheel displacement on surface generation;Journal of Manufacturing Processes;2022-03

3. Analysis on the removal mechanism of disc grinding based on dynamic thermal–mechanical coupling;International Journal of Mechanics and Materials in Design;2021-03-13

4. Lapping;Wafer Manufacturing;2021-01-09

5. On the periodicity of fixed-abrasive planetary lapping based on a generic model;Journal of Manufacturing Processes;2019-08
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