In situ planarization of dielectric surfaces using boron oxide
-
Published:
Issue:
Volume:
Page:
-
ISSN:
-
Container-title:Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference
-
language:
-
Short-container-title:
Author:
Marks J.,Law K.,Wang D.
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Optical characterization of oxynitride films in the visible-ultraviolet range;Applied Physics A Solids and Surfaces;1993-02
2. Gap‐Fill with PECVD SiO2 Using Deposition/Sputter Etch Cycles;Journal of The Electrochemical Society;1992-03-01
3. Interlevel Dielectrics and Passivating Films;Concise Encyclopedia of Semiconducting Materials & Related Technologies;1992