Author:
Nishida H.,Umezaki H.,Koyama N.,Sugita Y.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. FIELD CALCULATION IN SINGLE CYLINDERS OF INFINITE LENGTH BY USING A COUPLED T‐Ω AND A BOUNDARY ELEMENT TECHNIQUE;COMPEL - The international journal for computation and mathematics in electrical and electronic engineering;1992-01
2. Dry Etching for Microelectronics-A Bibliography;Dry Etching for Microelectronics;1984