20kW Solid-state Microwave Source Control System at 915MHz for Microwave Plasma Reactor
Author:
Affiliation:
1. Chinese Academy of Sciences,Institute of Plasma Physics, Hefei Institutes of Physical Science,Hefei,China,230031
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10275796/10276388/10276850.pdf?arnumber=10276850
Reference9 articles.
1. Design of an edge tapered 915 MHz/TM021 microwave plasma reactor by numerical analysis
2. Simulation and experimental studies of a 2.45GHz magnetron source for an SRF cavity with field amplitude and phase controls
3. Design and Development of CRIO based Data Acquisition and Control system for High Voltage Bushing Experiment
4. Understanding solid-state microwave synthesis using the diamond-like semiconductor, AgInSe2, as a case study
5. Distributed elementary ECR microwave plasma sources supplied by solid state generators for production of large area plasmas without scale limitation: plasma density measurements and comparison with simulation
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