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Piezotronic Effect based ZnO Pressure Sensor with TFT Structures

  • Published:2023-03-07 Issue: Volume: Page:
  • ISSN:
  • Container-title:2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
  • language:
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Author:

Kim Ki-Nam1,Ko Woon-San1,Byun Jun-Ho1,Lee Do-Yeon1,Kim Eun-Gi1,Koo Eun-A1,Kwon So-Yeon1,Lee Ga-Won1

Affiliation:

1. Chungnam National University,Korea

Publisher

IEEE

Reference7 articles.

1. Semiconducting and piezoelectric oxide nanostructures induced by polar surfaces;zhong lin;Advanced Functional Materials 14 10,2004

2. Wide bandgap semiconductor thin films for piezoelectric and piezoresistive MEMS sensors applied at high temperatures: an overview;mariana amorim;Microsystem Technologies,2014

3. Piezotronic effect: an emerging mechanism for sensing applications;kory;SENSORS,2015

4. Bottom-Gated ZnO TFT Pressure Sensor with 1D Nanorods;ki-nam;Sensors 22 22,2022

5. Towards self-powered nanosystems: from nanogenerators to nanopiezotronics;zhong lin;Advanced Functional Materials 18 22,2008
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