Positive/Negative Decision via Outlier Detection Toward Automatic Performance Evaluation for Defect Detector
Author:
Affiliation:
1. System Development Dept.1, Hitachi High-Tech Corporation, Tokyo, Japan
2. Metrology System Solution Development Department, Hitachi High-Tech Corporation, Ibaraki, Japan
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://xplorestaging.ieee.org/ielx7/66/10299929/10083280.pdf?arnumber=10083280
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