Multi-Scale and Multi-Branch Transformer Network for Remaining Useful Life Prediction in Ion Mill Etching Process
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Published:2023
Issue:
Volume:
Page:1-1
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ISSN:0894-6507
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Container-title:IEEE Transactions on Semiconductor Manufacturing
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language:
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Short-container-title:IEEE Trans. Semicond. Manufact.
Author:
Yuan Zengwei1ORCID,
Wang Rui1ORCID
Affiliation:
1. School of Mechanical Engineering and Automation, Harbin Institute of Technology, Shenzhen, China
Funder
Excellent Young Scientists Fund
Basic and Applied Basic Research Foundation of Guangdong Province
Shenzhen Scientific and Technological Foundation
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials