A Novel Multiscale Residual Aggregation Network-Based Image Super-Resolution Algorithm for Semiconductor Defect Inspection-Reference-Cited by-同舟云学术

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A Novel Multiscale Residual Aggregation Network-Based Image Super-Resolution Algorithm for Semiconductor Defect Inspection

Published:2023 Issue: Volume: Page:1-1
ISSN:0894-6507
Container-title:IEEE Transactions on Semiconductor Manufacturing
language:
Short-container-title:IEEE Trans. Semicond. Manufact.

Author:

Liu Yang¹^ORCID,Hu Lilei¹^ORCID,Sun Bin²,Ma Can¹,Shen Jingxuan¹,Chen Chang¹

Affiliation:

1. School of Microelectronics, Shanghai University, Shanghai, China

2. Institute of Advanced Materials (IAM), School of Material Science and Engineering, State Key Laboratory of Organic Electronics and Information Displays, Nanjing University of Posts and Telecommunications (NJUPT), Nanjing, China

Funder

Key Technologies Research and Development Program

National Key Scientific Instrument and Equipment Development Projects of China

National Natural Science Foundation of China

Shanghai Rising-Star Program

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/66/5159394/10297122.pdf?arnumber=10297122

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