Delving into Conversion Effects in 0.5 µm Thin Film Aluminum Nitride MEMS Devices-Reference-Cited by-同舟云学术

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Delving into Conversion Effects in 0.5 µm Thin Film Aluminum Nitride MEMS Devices

Published:2024-06-20 Issue: Volume:24 Page:1-5
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Container-title:2024 IEEE International Symposium on Robotic and Sensors Environments (ROSE)
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Author:

Trigona Carlo¹,Almani Suhail Ahmed¹,Mehdi Alireza¹,Salerno Giuliano A.¹,Strano Vincenzina²,Bartasyte Ausrine³,Margueron Samuel⁴,Baglio Salvatore¹,Micard Quentin³

Affiliation:

1. University of Catania,D. I. E. E. I., Dipartimento di Ingegneria Elettrica Elettronica e Informatica,Catania,Italy,95125

2. CNR-IMM,Catania,Italy,95123

3. Institut FEMTO-ST, Université Franche-Comté,Besançon,France,25030

4. Institut FEMTO-ST, ENSMM,Besançon,France,25030

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx8/10590708/10590795/10591168.pdf?arnumber=10591168

Reference25 articles.

1. Self-Powered Sensors: Applications, Challenges, and Solutions

2. Review in Energy Harvesting for Self-Powered Electronics Sensor

3. A comprehensive review on small-scale thermal energy harvesters: Advancements and applications

4. Energy Harvesting Techniques for Internet of Things (IoT)

5. "Bent beam" MEMS Temperature Sensors for Contactless Measurements in Harsh Environments

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