1. VNU University of Engineering and Technology, Vietnam,Department of Micro-Electro-Mechanical Systems and Micro Systems,Hanoi,Vietnam
2. Institute of Manufacturing for High-Tech Innovations, National Chung Cheng University,Department of Mechanical Engineering and Advanced,Chia-Yi,Taiwan
3. School of Mechanical Engineering, Hanoi University of Science and Technology, Vietnam,Faculty of Mechatronics,Hanoi,Vietnam
4. VNU University of Science,Faculty of Physics,Hanoi,Vietnam
5. Vietnam National University, Hanoi,Hanoi,Vietnam