A Low Power Four-Channel Metal Oxide Semiconductor Gas Sensor Array With T-Shaped Structure-Reference-Cited by-同舟云学术

A Low Power Four-Channel Metal Oxide Semiconductor Gas Sensor Array With T-Shaped Structure

Published:2022-04 Issue:2 Volume:31 Page:275-282
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Xue Feng¹^ORCID,Adedokun George¹^ORCID,Xie Dongcheng¹^ORCID,Liu Ruichen¹^ORCID,Zhang Yan¹^ORCID,Muhammad Mustafa¹,Xu Lei²^ORCID,Wu Feng³

Affiliation:

1. School of Microelectronics, University of Science and Technology of China, Hefei, China

2. Hefei National Laboratory for Physical Sciences at the Microscale and the School of Microelectronics, University of Science and Technology of China, Hefei, China

3. School of Information Science and Technology, University of Science and Technology of China, Hefei, China

Funder

National Key Research and Development Program of China

National Natural Science Foundation of China

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/9745978/09690584.pdf?arnumber=9690584

Reference23 articles.

1. Micro-machined gas sensor array based on metal film micro-heater

2. A $4\times4$ tin oxide gas sensor array with surface micro-machined convex micro-hotplates;guo;Proc IEEE Sensor,2006

3. A monolithic CMOS microhotplate-based gas sensor system

4. A Novel Low Power Hexagonal Gas Sensor Cell for Multi-Channel Gas Detection

5. High-performance gas sensor array for indoor air quality monitoring: the role of Au nanoparticles on WO3, SnO2, and NiO-based gas sensors

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