Scalable Throughput and Stable Scanning Probe Nanolithography Based on Local Anodic Oxidation by Arrayed Wear-Insensitive Sidewall Microprobes-Reference-Cited by-同舟云学术

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Scalable Throughput and Stable Scanning Probe Nanolithography Based on Local Anodic Oxidation by Arrayed Wear-Insensitive Sidewall Microprobes

Published:2015-10 Issue:5 Volume:24 Page:1471-1478
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Li Yong Fang,Sugiyama Masakazu,Toshiyoshi Hiroshi,Fujita Hiroyuki

Funder

New Energy and Industrial Technology Development Organization, Japan

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/7283693/07078833.pdf?arnumber=7078833

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design and analysis of a novel large-range 3-DOF compliant parallel micromanipulator;Advances in Mechanical Engineering;2021-12

2. Downscaled anodic oxidation process for aluminium in oxalic acid;IOP Conference Series: Materials Science and Engineering;2017-03

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