Improving the Sensitivity and Bandwidth of In-Plane Capacitive Microaccelerometers Using Compliant Mechanical Amplifiers-Reference-Cited by-同舟云学术

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Improving the Sensitivity and Bandwidth of In-Plane Capacitive Microaccelerometers Using Compliant Mechanical Amplifiers

Published:2014-08 Issue:4 Volume:23 Page:871-887
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Khan Sambuddha,Ananthasuresh G. K.

Funder

Indian Space Research Organization

Naval Physical and Oceanographic Laboratory

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/6866285/06734708.pdf?arnumber=6734708

Cited by 29 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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3. Design of a Micro-Electro Mechanical System Quad Mass Gyroscope with Compliant Mechanical Amplification;Micromachines;2024-01-11

4. A force-compensated compliant MEMS-amplifier with electrostatic anti-springs;Microsystems & Nanoengineering;2023-06-29

5. Design, Modeling and Simulation of Stretcher Suspended Micro- Accelerometer for Screech Detection;2023

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