Electrostatic charge and field sensors based on micromechanical resonators-Reference-Cited by-同舟云学术

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Electrostatic charge and field sensors based on micromechanical resonators

Published:2003-10 Issue:5 Volume:12 Page:577-589
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:en
Short-container-title:J. Microelectromech. Syst.

Author:

Riehl P.S.,Scott K.L.,Muller R.S.,Howe R.T.,Yasaitis J.A.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/27805/01240129.pdf?arnumber=1240129

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