A mems electromagnetic optical scanner for a commercial confocal laser scanning microscope-Reference-Cited by-同舟云学术

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A mems electromagnetic optical scanner for a commercial confocal laser scanning microscope

Published:2003-06 Issue:3 Volume:12 Page:243-251
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:en
Short-container-title:J. Microelectromech. Syst.

Author:

Miyajima H.,Asaoka N.,Isokawa T.,Ogata M.,Aoki Y.,Imai M.,Fujimori O.,Katashiro M.,Matsumoto K.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/27107/01203762.pdf?arnumber=1203762

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