Extended Design Space of Silicon-on-Nothing MEMS-Reference-Cited by-同舟云学术

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Extended Design Space of Silicon-on-Nothing MEMS

Published:2019-10 Issue:5 Volume:28 Page:850-858
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Wong Yu-Po^ORCID,Lorenzo Simon^ORCID,Miao Yu,Bregman Jeremy,Solgaard Olav^ORCID

Funder

National Science Foundation Graduate Research Fellowship Program

Stanford Graduate Fellowship

Enhancing Diversity in Graduate Research Fellowship

Boeing

National Science Foundation

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/8854232/08777326.pdf?arnumber=8777326

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Recent advances in micro- and bio- electromechanical system architectures for energy efficient chemiresistors;Microelectronic Engineering;2024-05

2. Cavity-agnostic acoustofluidic manipulations enabled by guided flexural waves on a membrane acoustic waveguide actuator;Microsystems & Nanoengineering;2024-03-08

3. Cavity-Agnostic Acoustofluidic Functions Enabled by Guided Flexural Waves on a Membrane Acoustic Waveguide Actuator;2023-09-22

4. Predicting AFM Topography from Optical Microscope Images Using Deep‐Learning;Advanced Intelligent Systems;2022-12-20

5. Simulation of Germanium-on-Nothing cavity’s morphological transformation using deep learning;Micro and Nano Systems Letters;2022-12-08

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