MEMS lubricants based on bound and mobile phases of hydrocarbon compounds: film deposition and performance evaluation-Reference-Cited by-同舟云学术

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MEMS lubricants based on bound and mobile phases of hydrocarbon compounds: film deposition and performance evaluation

Published:2005-10 Issue:5 Volume:14 Page:954-960
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Eapen K.C.,Patton S.T.,Smallwood S.A.,Phillips B.S.,Zabinski J.S.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/32479/01516177.pdf?arnumber=1516177

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3. Scaling Effects on Materials Tribology: From Macro to Micro Scale;Materials;2017-05-18

4. Contributions of Mobile and Bonded Molecules to Dynamic Friction of Nanometer-Thick Perfluoropolyether Films Coated on Magnetic Disk Surfaces;Tribology Letters;2013-10-22

5. Self-lubricating SU-8 Nanocomposites for Microelectromechanical Systems Applications;Tribology Letters;2012-10-14

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