Design, Fabrication, and Performance of a Piezoelectric Uniflex Microactuator-Reference-Cited by-同舟云学术

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Design, Fabrication, and Performance of a Piezoelectric Uniflex Microactuator

Published:2009-06 Issue:3 Volume:18 Page:616-625
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Kommepalli H.K.R.,Yu H.G.,Muhlstein C.L.,Trolier-McKinstry S.,Rahn C.D.,Tadigadapa S.A.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/5062320/04812078.pdf?arnumber=4812078

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design improvement of the conversion mechanism from balloon inflation to bending motion for inflatable film actuators;Microsystems & Nanoengineering;2023-05-09

2. Classification of actuation mechanism designs with structural block diagrams for flapping-wing drones: A comprehensive review;Progress in Aerospace Sciences;2022-07

3. MEMS actuators for biomedical applications: a review;Journal of Micromechanics and Microengineering;2020-05-29

4. Micro Motion Amplifiers for Compact Out-of-Plane Actuation;Micromachines;2018-07-23

5. Design of piezoMEMS for high strain rate nanomechanical experiments;Extreme Mechanics Letters;2018-04

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